| Title | 8 nm Step Height Standard (2.5×） |
|---|---|
| Date | September 23, 2026 |
| Pseudo-color | Rainbow Color Scale |
| Measurement System |
OptoNume SN507-P |
| Interference Objective Lens |
Nikon CF IC EPI Plan TI 2.5xA |
| Field of View | 4448 μm × 4448 μm |
| Averaging | Off |
| Display Range |
-2 to 8 nm |
| Sa | N/A |
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