GOS No. 656, “Step Height Calibration Using an 8 nm Step Height Standard (2.5×),” is now on display in the B1F Surface Measurement Standards Floor.
This study evaluates step height measurement using the OptoNume SN507-P with a Nikon 2.5× Michelson interference objective. Ten repeated measurements of the SHS-80 QC standard yielded a mean step height of 8.614 nm and a standard deviation of 0.0974 nm. The measured mean differed from the calibrated reference value of 8.9 nm by 0.29 nm.
Visit the exhibition page to view the measurement overview and technical document preview. The full measurement report is available for download by paid members.
