| Title | SiC Wafer (100x) |
|---|---|
| Date | September 8, 2025 |
| Pseudo-color | Rainbow Scale |
| Measurement System |
OptoNume® SN500 series |
| Interference Objective Lens |
Nikon CF IC EPI Plan DI 100x |
| Field of View | 112 μm x 112 μm |
| Averaging | 12 |
| Display Range |
-0.5 to 2 nm |
| Sa | 0.047 nm |
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