GOS No. 672 demonstrates the accuracy and repeatability of cross-section measurement using an 8 μm step height standard. Repeated measurements using the cross-sectional analysis method achieved an excellent standard deviation of σ = 0.0066 μm and a coefficient of variation of 0.08%.
This result confirms that the cross-sectional measurement technique used in previous GOS reports, including GOS No. 572 and GOS No. 542, is traceable to an internationally standardized step height reference. The report highlights the quantitative reliability of white-light interferometric cross-sectional surface analysis.
